JPH0473968U - - Google Patents
Info
- Publication number
- JPH0473968U JPH0473968U JP11832990U JP11832990U JPH0473968U JP H0473968 U JPH0473968 U JP H0473968U JP 11832990 U JP11832990 U JP 11832990U JP 11832990 U JP11832990 U JP 11832990U JP H0473968 U JPH0473968 U JP H0473968U
- Authority
- JP
- Japan
- Prior art keywords
- vapor deposition
- laser
- deposition material
- diagram showing
- target
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007740 vapor deposition Methods 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11832990U JPH0473968U (en]) | 1990-11-08 | 1990-11-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11832990U JPH0473968U (en]) | 1990-11-08 | 1990-11-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0473968U true JPH0473968U (en]) | 1992-06-29 |
Family
ID=31866247
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11832990U Pending JPH0473968U (en]) | 1990-11-08 | 1990-11-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0473968U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006009072A (ja) * | 2004-06-24 | 2006-01-12 | Toyota Central Res & Dev Lab Inc | 基材の表面改質方法及び基材の表面改質装置 |
-
1990
- 1990-11-08 JP JP11832990U patent/JPH0473968U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006009072A (ja) * | 2004-06-24 | 2006-01-12 | Toyota Central Res & Dev Lab Inc | 基材の表面改質方法及び基材の表面改質装置 |
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